home-logo04.jpg
home-logo04.jpg

KASHIYAMA SDE Series Vacuum Pumps

SKU:

Add to Enquiry
Loading...

Description

SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / Products SDE90X SDE120TX SDE200 SDE303X SDE603X SDE1203TX SDE20N12TX SDE30N20 SDE60N20
Max. pumping speed
[L/min] *1		 1,300 1,500 3,300 5,000 10,000 20,000 30,000 50,000 100,000
Ultimate pressure
[Pa] *1		 1.3 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V, 380～480V
Power consumption [kW]*2 1.3 2.8 2.7 1.5 1.6 3.2 3.3 3.7
Dimensions [mm]*3 L 690 930 900 1000 1000 1080
W 370 400 400 450 450 515
H 501 500 905 1000 950 950

*1) Without N2 purge. *2) Approx. value at ultimate pressure. *3) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice. * Contact us about applicable gas.

S-P Curve

S-P Curve
* S-P curves vary by combination.

Option

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).

Related Products

CANON ANELVA Helium Leak Detectors
CANON ANELVA Vacuum Gauges
home-logo06.jpg
Yamoto Scientific – Ovens and Furnaces
home-logo04.jpg
KASHIYAMA MU-X/P Series Vacuum Pumps
home-logo04.jpg
KASHIYAMA NeoDry Series Vacuum Pumps
ferrotec-logo-png-transparent
FERROTEC Chiller System
ferrotec-logo-png-transparent
FERROTEC Electron Beam Systems and Accessories
Coltraco-Logo
COLTRACO Ultrasonic Leak Detectors for Room Integrity Testing
home-logo06.jpg
Yamoto Scientific – Laboratory Equipment
Metal Bellows and Quartz Products
PVA TEPLA Gas Plasma Processing System
PCT Megasonic Cleaners

Product Categories

home-logo04.jpg
home-logo04.jpg

KASHIYAMA SDE Series Vacuum Pumps

SDE Series

Apply screw type rotor with higher performance against by-product. High corrosion resistance from structural materials and temperature control.

Harsh Process Application Example

Harsh Process Application Example

Lineup by Max. Pumping Speed

Lineup by Pumping Speed
Max. Pumping Speed[L/min]

Major Products

Spec. / Products SDE90X SDE120TX SDE200 SDE303X SDE603X SDE1203TX SDE20N12TX SDE30N20 SDE60N20
Max. pumping speed
[L/min] *1		 1,300 1,500 3,300 5,000 10,000 20,000 30,000 50,000 100,000
Ultimate pressure
[Pa] *1		 1.3 0.5
Supply voltage
(50/60Hz)		 3Phase AC200～220V, 380～480V
Power consumption [kW]*2 1.3 2.8 2.7 1.5 1.6 3.2 3.3 3.7
Dimensions [mm]*3 L 690 930 900 1000 1000 1080
W 370 400 400 450 450 515
H 501 500 905 1000 950 950

*1) Without N2 purge. *2) Approx. value at ultimate pressure. *3) Package size.
* Contact us about international standard compliance. Spec. & name of products are subject to change without prior notice. * Contact us about applicable gas.

S-P Curve

S-P Curve
* S-P curves vary by combination.

Option

Dry Pump temperature selection for each process. Select booster pump / pipe heating specification. Supplemental choice of foreline & exhaust-line against by-product. Operational status can be monitored by Centralized Monitoring System (CMS). The total exhaust system of which equipped with abatement(heater, plasma, or combustion model).
home-logo04.jpg
Add to Enquiry