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KASHIYAMA Dry Vacuum Pumps
ITS Cleaning Sheets For Probe Cards & Test Sockets
Chuck Cleaning Wafers
SITEK Re-furbished Spin Rinse Dryers / New Rotors / Rotor Balancing
SRD Spare Parts
Re-furbished Cassette / Box Cleaners
PCT Megasonic Cleaners
Wafermasters Rapid Thermal Processors and Metrology Products
PVA TEPLA Gas Plasma Processing System
Metal Bellows and Quartz Products
Carbon Composite & Graphite Products
Celadon Advance Cantilever Probe Cards
Advanflo Phosphor Spray Coater
YAMATO SCIENTIFIC
Wafermasters Rapid Thermal Processors and Metrology Products
WaferMasters, Inc. system is designed based on a resistively heated, single wafer furnace technology to address conventional batch furnace thermal applications as well as RTP applications up to 1150°C.
The system provides excellent process repeatability and stability at a minimum cost of ownership. Various features available to handle different cleaning requirements
Metrology Products
OSP-300 (Optical Surface Profilometry) for wafer surface profiling, wafer bow, warpage, local distortion, stress, strain etc. Can be used to predict potential wafer breakage during manufacturing steps.
MRS-300 (Multi-wavelength Raman Spectroscopy) lattice level crystal stress/strain mapping.
To predict poor device performance before electrical test through stress/strain measurement by Raman signal.
These metrology tools can provide additional insights into material properties and the effect of individual and/or a series of process steps onto wafers.